Hi,
 
I am interested in using confocal microscopy techniques
for materials analysis of semiconductors.  Is anyone
aware of good work done in this area?  If so, some
preliminary questions:  (a) what type of light source
was used and with what resolution, (b)  what was
the maximum depth that could be resolved, (c) what type
of optics were required , and (d) what type of CCD or
detector was used?
 
I imagine there is also a vast resource of references
available on this particular topic.  Does anyone have
recommendations?
 
Thank you,
 
Raj Gupta
M.I.T.