PROBEUSERS Archives

September 2019

PROBEUSERS@LISTS.UMN.EDU

Options: Use Monospaced Font
Show HTML Part by Default
Show All Mail Headers

Message: [<< First] [< Prev] [Next >] [Last >>]
Topic: [<< First] [< Prev] [Next >] [Last >>]
Author: [<< First] [< Prev] [Next >] [Last >>]

Print Reply
Subject:
From:
John H Fournelle <[log in to unmask]>
Reply To:
JEOL-Focused Probe Users List <[log in to unmask]>
Date:
Fri, 13 Sep 2019 15:56:42 +0000
Content-Type:
multipart/alternative
Parts/Attachments:
text/plain (1601 bytes) , text/html (3005 bytes)
I have been using EPMA and thin film programs (GMRFilm, STRATAGem and now BadgerFilm) for backing out thin film compositions and thicknesses.

Someone recently contacted me and mentioned that they use RBS for _very_ accurate thin film determinations and indicated that sometimes EPMA-generated thin film results (using thin film software) may not produce the “right results”.

Is there anyone out there is probe land who is well versed in both RBS and EPMA-thin film analysis to give some information on this topic.

In googling around for 30 minutes, I learned some, but the impression is that RBS is also “model” based and fits the observed spectra with theoretical models based upon presumed (possible) compositions; thus one question would be, how sensitive is it to differences in stoichiometries, e.g. if the client stated they were trying to generate a 1:1 stoichometry of a film on a substrate, but it actually was 1:1.5, would there be enough sensitivity in RBS to distinguish the two?

John
=============================
John Fournelle, Ph.D.
Senior Scientist
Director, Electron Probe and SEM Labs
University of Wisconsin Dept of Geoscience
1215 West Dayton Street
Madison, Wisconsin 53706
Cell 608-438-7480





****
JEOL Probe Users Listserver

Moderator: Anette von der Handt, [log in to unmask],
Electron Microprobe Lab, University of Minnesota

Post a message: send your message to [log in to unmask]

Unsubscribe: send "SIGNOFF PROBEUSERS" to [log in to unmask]

On-line help and FAQ: http://probelab.geo.umn.edu/jeoluserlist.html

*

ATOM RSS1 RSS2